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Keithley 4200A Data Sheet


Keithley 4200A-SCS Parameter Analyzer

Keithley 4200A-SCS image 2 Keithley 4200A-SCS image 3 Keithley 4200A - 2 new SMU Modules

 

Up to 2X Faster Characterization Insight for Your Bold Discoveries

The 4200A-SCS is a modular, customizable, and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V electrical characterization. Its optional 4200A-CVIV Multi-switch Module enables effortless switching between I-V and C-V measurements without re-cabling or lifting prober needles. The highest performance analyzer, the 4200A-SCS accelerates testing of complex devices for materials research, semiconductor device design, process development, or production.


The NEW model...

 

 

 


Automatic Measurements

 


Overview

 

Keithley 4200A Parameter Analyser MOSFET testing

 

Parametric insight, fast and clear.

Making connections to your bold discoveries has never been easier. The 4200A-SCS Parameter Analyzer reduces characterization complexity and test setup by up to 50%, providing clear, uncompromised measurement and analysis capability. Plus, embedded measurement expertise - an industry first - provides test guidance and gives you supreme confidence in your results.

Highlights

  • Built-in measurement videos in English, Chinese, Japanese, and Korean
  • Jump start your testing with hundreds of user-modifiable application tests
  • Automated real-time parameter extraction, data graphing, arithmetic functions
 

Measure. Switch. Repeat.

The 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips. Unlike competing products, the four-channel 4200A-CVIV display provides local visual insight for quick test setup and easy troubleshooting when unexpected results occur. 

Highlights

  • Move C-V measurement to any device terminal without re-cabling
  • User-configurable for low current capability
  • Personalize the names of output channels
  • View real-time test status

  

Keithley 4200A Parameter Analyser Multi-switch

 

 

Stable low current measurements for I-V Characterization

Making Stable Low Current Measurements on High Capacitance Test Connections Using the 4201-SMU and 4211-SMU - Play Video

With the 4201-SMU and 4211-SMU modules you can achieve stable low current measurements in a high capacitance system. With four models of source measure unit (SMU) to choose from, the 4200A-SCS can be customized to meet all of your I-V measurement needs. By offering field Installable Units and optional preamplifier modules, Keithley makes sure that you can make the most accurate low current measurements with little to no downtime.

Making Stable Low Current Measurements with High Test Connection Capacitance Using the 4201-SMU and 4211-SMU

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Highlights

  • Add an SMU without an sending the instrument back to the factory

  • Make femptoamp measurements

  • Up to 9 SMU channels

  • Optimized for long cables or large chucks

Integrated solution with analytical probers and cryogenic controllers.

The 4200A-SCS Parameter Analyzer supports many manual and semi-automated wafer probers and cryogenic temperature controllers, including MPI Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, LakeShore Model 336 cryogenic temperature controller.

Highlights

  • "Point and click" test sequencing
  • "Manual" prober mode tests prober functionality
  • Fake prober mode enables debugging without removing commands
Keithley 4200A Parameter Analyser with wafer probes  

 


Modules

Module

Description

4200-CVIV

I-V/C-V MULTI-SWITCH MODULE

4201-SMU 

Medium Power Source Measure Unit for High-Capacitance Setups

4211-SMU

High Power Source Measure Unit for High-Capacitance Setups

4201-SMU-R

Field Installable Medium Power Source Measure Unit for High-Capacitance Setups 

4211-SMU-R 

Field Installable High Power Source Measure Unit for High-Capacitance Setups

4200-SMU

MEDIUM POWER SOURCE-MEASURE UNIT

4210-SMU

HIGH POWER SOURCE-MEASURE UNIT 

4200-SMU-R

FIELD REPLACEABLE MPSMU

4210-SMU-R 

FIELD REPLACEABLE HPSMU

4200-PA

REMOTE PREAMP OPT 4200-SMU AND 4210-SMU

4210-CVU

4210 CAPACITANCE VOLTAGE UNIT 1KHZ-10MHZ

4220-PGU

DUAL CHANNEL PULSE GENERATOR

4225-PMU

ULTRA-FAST I-V MODULE FOR THE 4200-SCS

4225-RPM

REMOTE AMPLIFIER/SWITCH FOR THE MODEL 4225-PMU

4200-BTI-A

ULTRA FAST BTI PKG


Preconfigured Systems

Configuration

Specification

4200A-SCS-PK1

High Resolution IV

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210V/100mA, 0.1 fA resolution For two- and three-terminal devices, MOSFET, CMOS characterization

Package 4200A-SCS-PK1 includes:

  • 4200A-SCS parameter analyzer
  • (2) 4200-SMU Module
  • (1) 4200-PA Preamp
  • (1) 8101-PIV Test fixture with sample devices

4200A-SCS-PK2

High Resolution IV & CV

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210V/100mA, 0.1 fA resolution, 1kHz - 10MHz For high κ dielectric, deep submicron CMOS characterization

Package 4200A-SCS-PK2 includes:

4200A-SCS parameter analyzer

(2) 4200-SMU Module

(1) 4200-PA Preamp

(1) 4210-CVU Capacitance-Voltage Module

(1) 8101-PIV Test fixture with sample devices

4200A-SCS-PK3

High Resolution and Power IV & CV

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210V/1A, 0.1 fA resolution, 1kHz - 10MHz For power devices, high κ dielectric, deep submicron CMOS device characterization

Package 4200A-SCS-PK3 includes:

4200A-SCS parameter analyzer

(2) 4200-SMU Module

(2) 4210-SMU

(1) 4200-PA Preamp

(1) 4210-CVU Capacitance-Voltage Module

(1) 8101-PIV Test fixture with sample devices

4200-BTI-A

Ultra-fast NBTI/PBTI

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For sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology

Package 4200-BTI-A includes:

  • (1) 4225-PMU Ultra-Fast I-V Module
  • (2) 4225-RPM Remote Preamplifier/Switch Modules
  • Automated Characterization Suite (ACS) Software
  • Ultra-Fast BTI Test Project Module
  • Cabling

Applications

   Keithley 4200A Application 1

Semiconductor Reliability

Perform complex reliability tests while letting the 4200A-SCS take care of the complexities. Included projects like Hot Carrier Injection Degradation (HCI) and Negative Bias Temperature Instability (NBTI) give you a jump start on device analysis. For larger labs, the 4200-BTI package includes site mapping and automatic prober control with Keithley’s ACS software.

Evaluating Hot Carrier Induced Degradation of MOSFET Devices

Document link

Highlights

  • Combine DC I-V, C-V, and pulse measurements in one set of tests
  • Included support for many probe stations and external instruments
  • Easy to use cycling system allows repeat measurements without coding

 

C-V Measurement for High Impedance Applications

Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.

Performing Very Low Frequency Capacitance-Voltage Measurements on High Impedance Devices Using the 4200A-SCS Parameter Analyzer 

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Tips and Techniques to Simplify MOSFET/MOSCAP Device Characterization
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Highlights

  • .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
  • 3½-digit typical resolution, minimum typical of 10 fF
Keithley 4200A Application 2

 

Keithley 4200A Application 3

Non-volatile Memory


Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.

Single Nanosecond Pulsing Solutions for Non-Volatile Memory Testing

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Pulse I-V Characterization of Non-Volatile Memory Technologies

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Testing when using Long Cables or Capacitive Fixtures

Use 4201 or 4211-SMUs when making tests requires very long cabling or fixtures with higher capacitances. These SMUs are ideal for connecting to LCD test stations, probers, switch matrices or any other large or complicated tester. Field installable versions allow you to add capacity without returning the unit to a service center.  

Keithley 4200A Application 4

 

Keithley 4200A Applicaiton 5

Nanoscale Device Characterization  

The integrated instrument capabilities of the 4200A-SCS simplify the measurement requirements in developing nanoscale electronics such as carbon nanotubes. Start your investigations from a preconfigured test project and expand your work from there. A pulsed source mode for SMUs helps reduce overheating problems can be combined with low voltage C-V and ultra-fast pulsed DC measurements in seconds.  

Electrical Characterization of Carbon Nanotube Document link
Transistors (CNT FETs)

 

 

Resistivity of Materials

Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >10­­­­16 ohms give you more accurate and precise results.  

Resistivity Measurements of Semiconductor Materials Using the 4200A-SCS Parameter Analyzer and a Four-Point Collinear Probe

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van der Pauw and Hall Voltage Measurements with the
4200A-SCS Parameter Analyzer

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Keithley 4200A Application 6

 

Keithley 4200A Application 7   

 MOSFET Characterization

The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.  

C-V Characterization of MOS Capacitors Using the 4200A-SCS Parameter Analyzer

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